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Properties of hydrogenated amorphous/nanocrystalline carbon films prepared by plasma enhanced chemical vapour deposition

✍ Scribed by Huran, J; Zat'ko, B; Boháček, P; Kobzev, A P; Vincze, A; Malinovský, E; Valovič, A

Book ID: 121434536
Publisher: IOP Publishing
Year: 2010
Weight: 386 KB
Volume: 12
Category: Article
ISSN: 1757-8981
DOI: 10.1088/1757-899X/12/1/012005

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