Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition

✍ Scribed by J Huran; J Šafránková; A.P. Kobzev

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 252 KB
• Volume: 50
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(98)00031-1

✦ Synopsis

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic. The I-U measurements were used to electrical characterization of Au Schottky contacts prepared on Sic surfaces.