✦ LIBER ✦

AlN thin films prepared by plasma-enhanced chemical vapour deposition

✍ Scribed by C.H. Lee; C.T. Wu; C.Y. Peung

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thin palladium films prepared by metal-o

✍ E. Feurer; H. Suhr 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 251 KB

Preparation of ZnO thin films by plasma-

✍ Masaru Shimizu; Tadashi Horii; Tadashi Shiosaki; Akira Kawabata 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 941 KB

Dielectric properties of AlN films prepa

✍ X. Li; T.L. Tansley; V.W.L. Chin 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 387 KB

Conduction properties of amorphous Ta2O5

✍ J.L. Autran; P. Paillet; J.L. Leray; R.A.B. Devine 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 295 KB

Deposition of silicon carbide films by p

✍ J Ramirez; H Suhr; L Szepes; L Zanathy; A Nagy 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 692 KB

Properties of aluminium oxide films prep

✍ Chang Jin Kang; John S. Chun; Wong Jong Lee 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 741 KB