✦ LIBER ✦

Study of the chemical composition of silicon nitride films obtained by chemical vapour deposition and plasma-enhanced chemical vapour deposition

✍ Scribed by C. Oliveri; F. Baroetto; C. Magro

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Deposition of silicon carbide films by p

✍ J Ramirez; H Suhr; L Szepes; L Zanathy; A Nagy 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 692 KB

Chemical stability of hydrogen-containin

✍ Z.L. Akkerman; M.L. Kosinova; N.I. Fainer; Yu.M. Rumjantsev; N.P. Sysoeva 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 496 KB

Oxidation of plasma enhanced chemical va

✍ C.M.M. Denisse; H.E. Smulders; F.H.P.M. Habraken; W.F. Van der Weg 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 302 KB

UV Moderation of Nitride Films during Re

✍ Butcher, K.S.A. ;Afifuddin, ;Chen, P.P.-T. ;Goldys, E.M. ;Tansley, T.L. 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 85 KB 👁 2 views

The correlations between properties of p

✍ Xiumiao Zhang; Guohua Shi; Ailing Yang; Diling Shao 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 481 KB

Properties of silicon nitride films prep

✍ Hideo Watanabe; Kazuhisa Katoh; Shin-Ichi Imagi 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 370 KB