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The subimplantation model for hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma

โœ Scribed by O. Durand-Drouhin; M. Lejeune; R. Bouzerar; M. Benlahsen

Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
87 KB
Volume
4
Category
Article
ISSN
1369-8001

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