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On the microstructural, optical and mechanical properties of hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma

✍ Scribed by Durand-Drouhin, O.; Zeinert, A.; Benlahsen, M.; Zellama, K.; Kré, R.; Turban, G.; Grosman, A.

No coin nor oath required. For personal study only.

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