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Growth and bonding structure of hard hydrogenated amorphous carbon thin films deposited from an electron cyclotron resonance plasma

✍ Scribed by Durand-Drouhin, O.; Lejeune, M.; Benlahsen, M.

Book ID: 118261017
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 348 KB
Volume: 91
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1423786

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