Optical absorption in amorphous hydrogenated silicon nitride thin films deposited by the electron cyclotron resonance plasma method and subjected to rapid thermal annealing

✍ Scribed by F.L. Martínez; I. Mártil; G. González-Díaz; A.M. Bernal-Oliva; J.M. González-Leal; E. Márquez

• Book ID: 114086717
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 391 KB
• Volume: 343-344
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(98)01669-1