✦ LIBER ✦
Comparative study of the effect of thermal annealing on the hydrogen stability and the stress in a-C:H films deposited by electron cyclotron resonance glow discharge and direct current multipolar plasma methods
✍ Scribed by M Benlahsen; B Racine; M Clin; K Zellama
- Book ID
- 117150343
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 123 KB
- Volume
- 266-269
- Category
- Article
- ISSN
- 0022-3093
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