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Ni based silicides for 45 nm CMOS and beyond

✍ Scribed by Anne Lauwers; Jorge A. Kittl; Mark J.H. Van Dal; Oxana Chamirian; Malgorzata A. Pawlak; Muriel de Potter; Richard Lindsay; Toon Raymakers; Xavier Pages; Bencherki Mebarki; Tushar Mandrekar; Karen Maex

Book ID: 103843128
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 644 KB
Volume: 114-115
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2004.07.028

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