Modeling of microwave discharges of H[sub 2] admixed with CH[sub 4] for diamond deposition

✍ Scribed by Lombardi, G.; Hassouni, K.; Stancu, G.-D.; Mechold, L.; Röpcke, J.; Gicquel, A.

• Book ID: 120027750
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 732 KB
• Volume: 98
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.2034646