✦ LIBER ✦

Mass spectrometric studies of a CH[sub 4]/H[sub 2] microwave plasma under diamond deposition conditions

✍ Scribed by Fujii, Toshihiro; Kareev, Michael

Book ID: 121679968
Publisher: American Institute of Physics
Year: 2001
Tongue: English
Weight: 286 KB
Volume: 89
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1346655

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Modeling of microwave discharges of H[su

Modeling of microwave discharges of H[sub 2] admixed with CH[sub 4] for diamond deposition

✍ Lombardi, G.; Hassouni, K.; Stancu, G.-D.; Mechold, L.; RoÌpcke, J.; Gicquel, A 📂 Article 📅 2005 🏛 American Institute of Physics 🌐 English ⚖ 732 KB

Role of xenon additive in microwave plas

Role of xenon additive in microwave plasma-assisted (H[sub 2]+CH[sub 4]) chemical vapor deposition of diamond thin film

✍ Hosomi, Takeshi; Maki, Tetsuro; Kobayashi, Takeshi; Yoshizako, Yuji; Taniguchi, 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 525 KB

Spectroscopic diagnostics and modeling o

Spectroscopic diagnostics and modeling of ArâH[sub 2]âCH[sub 4] microwave discharges used for nanocrystalline diamond deposition

✍ Lombardi, G.; Hassouni, K.; BeÌneÌdic, F.; Mohasseb, F.; RoÌpcke, J.; Gicquel 📂 Article 📅 2004 🏛 American Institute of Physics 🌐 English ⚖ 607 KB

Synthesis and electron field emission of

Synthesis and electron field emission of nanocrystalline diamond thin films grown from N[sub 2]/CH[sub 4] microwave plasmas

✍ D. Zhou; A. R. Krauss; L. C. Qin; T. G. Mccauley; D. M. Gruen; T. D. Corrigan; R 📂 Article 📅 1997 🏛 American Institute of Physics 🌐 English ⚖ 618 KB

Optical and mass spectroscopy measuremen

Optical and mass spectroscopy measurements of Ar/CH4/H2 microwave plasma for nano-crystalline diamond film deposition

✍ Zhou, Haiyang; Watanabe, Jun; Miyake, Masato; Ogino, Akihisa; Nagatsu, Masaaki; 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 290 KB

Diagnostic Studies of a CH 4 /H 2 Microw

Diagnostic Studies of a CH 4 /H 2 Microwave Plasma by Mass Spectrometry: Ionic and Neutral Species

✍ Fujii, Toshihiro; Kareev, Michael 📂 Article 📅 2001 🏛 American Chemical Society 🌐 English ⚖ 61 KB