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Optical and mass spectroscopy measurements of Ar/CH4/H2 microwave plasma for nano-crystalline diamond film deposition

✍ Scribed by Zhou, Haiyang; Watanabe, Jun; Miyake, Masato; Ogino, Akihisa; Nagatsu, Masaaki; Zhan, Rujuan

No coin nor oath required. For personal study only.

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