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Optical study of defects in nano-diamond films grown in linear antenna microwave plasma CVD from H 2 /CH 4 /CO 2 gas mixture

โœ Scribed by Varga, M.; Remes, Z.; Babchenko, O.; Kromka, A.

Book ID
118766492
Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
310 KB
Volume
249
Category
Article
ISSN
0370-1972

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Growth of diamond films from microwave p
Growth of diamond films from microwave plasma in CH4-CO2 mixtures
โœ G. Balestrino; M. Marinelli; E. Milani; A. Paoletti; P. Paroli; I. Pinter; A. Te ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 392 KB

We have studied the growth of diamond films from microwave plasma using gas mixtures of CH,-CO, (not previously reported in the literature) onto Si substrates. The diamond phase is obtained in the molar ratio .range 0.7 <CO,/ CH, G 1.38 -C 0.05, in close agreement with the empirical model of Bachman