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Electron energy distribution functions and rate and transport coefficients of H2/H/CH4reactive plasmas for diamond film deposition

✍ Scribed by M. Capitelli; G. Colonna; K. Hassouni; A. Gicquel

Publisher: Springer
Year: 1996
Tongue: English
Weight: 679 KB
Volume: 16
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf01570175

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