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Spectroscopic diagnostics and modeling of ArâH[sub 2]âCH[sub 4] microwave discharges used for nanocrystalline diamond deposition

✍ Scribed by Lombardi, G.; Hassouni, K.; BeÌneÌdic, F.; Mohasseb, F.; RoÌpcke, J.; Gicquel, A.

Book ID: 120256585
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 607 KB
Volume: 96
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1814174

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