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Determination of gas temperature and C 2 absolute density in Ar/H 2 /CH 4 microwave discharges used for nanocrystalline diamond deposition from the C 2 Mulliken system

✍ Scribed by Lombardi, G; Bénédic, F; Mohasseb, F; Hassouni, K; Gicquel, A


Book ID
121300978
Publisher
Institute of Physics
Year
2004
Tongue
English
Weight
442 KB
Volume
13
Category
Article
ISSN
0963-0252

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