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Deposition of nanocrystalline diamond films on silicon nitride ceramic substrates using pulsed microwave discharges in Ar/H2/CH4 gas mixture

✍ Scribed by Bruno, P.; Bénédic, F.; Tallaire, A.; Silva, F.; Oliveira, F.J.; Amaral, M.; Fernandes, A.J.S.; Cicala, G.; Silva, R.F.


Book ID
121253974
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
419 KB
Volume
14
Category
Article
ISSN
0925-9635

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Versatile properties of nanocrystalline
✍ Monéger, D. ;Bénédic, F. ;Sarry, F. ;Renard, P. ;Azouani, R. ;Elmazria, O. ;Silv 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 255 KB

## Abstract In this paper, we discuss on the versatility of nanocrystalline diamond (NCD) film properties as a function of the process parameters aiming to properly fulfil the requirements for various applications. NCD films are achieved in Ar/H~2~/CH~4~ microwave discharges. Their characteristics