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Deposition of nanocrystalline diamond films in pulsed Ar/H2/CH4 microwave discharges

✍ Scribed by Monéger, D.; Bénédic, F.; Azouani, R.; Chelibane, F.; Syll, O.; Silva, F.; Gicquel, A.

Book ID: 117995526
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 472 KB
Volume: 16
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2006.11.098

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