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Formation of soot particles in Ar/H2/CH4 microwave discharges during nanocrystalline diamond deposition: A modeling approach

✍ Scribed by Hassouni, K.; Mohasseb, F.; Bénédic, F.; Lombardi, G.; Gicquel, A.

Book ID: 126622798
Publisher: International Union of Pure and Applied Chemistry
Year: 2006
Tongue: English
Weight: 877 KB
Volume: 78
Category: Article
ISSN: 0033-4545
DOI: 10.1351/pac200678061127

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