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Nanocrystalline diamond deposition in electron-temperature-controlled CH4/H2/Ar plasma

✍ Scribed by Reijiro Ikada; Kohgi Kato; Toshimi Abe; Satoru Iizuka

Book ID: 108289045
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 202 KB
Volume: 506-507
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.08.085

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