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Nanocrystalline diamond formation by using an inductively coupled radio-frequency CH4/H2/Ar plasma

✍ Scribed by Ikada, Reijiro; Iizuka, Satoru

Book ID: 122727140
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 279 KB
Volume: 14
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2004.12.035

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