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Ion Molecule and Dust Particle Formation in Ar/CH4, Ar/C2H2 and Ar/C3H6 Radio-frequency Plasmas

✍ Scribed by H. T. Do; G. Thieme; M. Fröhlich; H. Kersten; R. Hippler


Book ID
102815604
Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
968 KB
Volume
45
Category
Article
ISSN
0005-8025

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✦ Synopsis


Abstract

Molecule and particle formation in a capacitively coupled radio‐frequency discharge has been investigated. Formation of molecular ions has been investigated by means of plasma process monitoring employing energydispersive mass spectrometry. Particle growth has been studied by recording the intensity of the transmitted and scattered laser light signal from the particle cloud. An oscillation of the transmitted laser intensity was observed which is caused by periodic formation and expansion of a central void. This behavior can be explained by multigeneration dust cloud formation. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)


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