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Growth of faceted, ballas-like and nanocrystalline diamond films deposited in CH4/H2/Ar MPCVD

✍ Scribed by Yang, Tien-Syh; Lai, Jir-Yon; Cheng, Chia-Liang; Wong, Ming-Show

Book ID
122012974
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
580 KB
Volume
10
Category
Article
ISSN
0925-9635

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Versatile properties of nanocrystalline
Versatile properties of nanocrystalline diamond films deposited in Ar/H2/CH4microwave discharges as a function of process parameters
✍ Monéger, D. ;Bénédic, F. ;Sarry, F. ;Renard, P. ;Azouani, R. ;Elmazria, O. ;Silv 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 255 KB

## Abstract In this paper, we discuss on the versatility of nanocrystalline diamond (NCD) film properties as a function of the process parameters aiming to properly fulfil the requirements for various applications. NCD films are achieved in Ar/H~2~/CH~4~ microwave discharges. Their characteristics