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Growth of ultrananocrystalline diamond films in an Ar-rich CH4/H2/Ar atmosphere with varying H2 concentrations

✍ Scribed by Liu, Jie; Hei, Li-fu; Chen, Guang-chao; Li, Cheng-ming; Tang, Wei-zhong; Lu, Fan-xiu

Book ID: 122705672
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 34 KB
Volume: 60
Category: Article
ISSN: 0008-6223
DOI: 10.1016/j.carbon.2013.04.028

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## Abstract In this paper, we discuss on the versatility of nanocrystalline diamond (NCD) film properties as a function of the process parameters aiming to properly fulfil the requirements for various applications. NCD films are achieved in Ar/H~2~/CH~4~ microwave discharges. Their characteristics