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Energy distribution of H atom and C2 radical during diamond growth in H2/ArCH4O2 plasma

✍ Scribed by Mitsuda, Yoshitaka; Sakai, Shigeki

Book ID: 123389118
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 404 KB
Volume: 6
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(96)00618-8

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