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Comparison of (CH4O2)bH2 and COH2 plasmas for low temperature diamond film deposition by electron cyclotron resonance plasma-assisted chemical vapor deposition

✍ Scribed by Eddy, C.R.; Youchison, D.L.; Sartwell, B.D.


Book ID
121385961
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
748 KB
Volume
3
Category
Article
ISSN
0925-9635

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