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Low-Temperature Synthesis of Diamond-like Carbon Films on Steel Substrates by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical Vapor Deposition

✍ Scribed by Shen Zhu; Fatemeh Shahedipour; Henry W. White

Book ID: 110827516
Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 343 KB
Volume: 81
Category: Article
ISSN: 0002-7820
DOI: 10.1111/j.1151-2916.1998.tb02445.x

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