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Mechanical and Tribological Properties of Diamond-Like Carbon Films Deposited by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition

✍ Scribed by Qi Jun; Luo Jianbin; Wang Kunlin; Wen Shizhu

Book ID: 110410456
Publisher: Springer US
Year: 2003
Tongue: English
Weight: 264 KB
Volume: 14
Category: Article
ISSN: 1023-8883
DOI: 10.1023/a:1021704320444

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