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Structure, Composition, Mechanical, and Tribological Properties of BCN Films Deposited by Plasma Enhanced Chemical Vapor Deposition

✍ Scribed by D. Kurapov; J. M. Schneider

Publisher: Springer
Year: 2005
Tongue: English
Weight: 221 KB
Volume: 25
Category: Article
ISSN: 0272-4324
DOI: 10.1007/s11090-005-6816-x

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