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Deposition of thin rhodium films by plasma-enhanced chemical vapor deposition

✍ Scribed by A. Etspüler; H. Suhr

Publisher
Springer
Year
1989
Tongue
English
Weight
355 KB
Volume
48
Category
Article
ISSN
1432-0630

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Structure of copolymer films created by
Structure of copolymer films created by plasma enhanced chemical vapor deposition
✍ Someswara R. Peri; Hyeonjae Kim; Bulent Akgun; Jesse Enlow; Hao Jiang; Timothy J 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 622 KB

The interface structure in copolymer films made using plasma enhanced chemical vapor deposition (PECVD) has been probed for the first time using X-ray reflectivity. Copolymer films made from comonomers benzene (B), octafluorocyclobutane (OFCB), and hexamethyldisiloxane (HMDS) show extremely sharp in