𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Deposition of thin films of Zirconium and Hafnium Boride by plasma enhanced chemical vapor deposition

✍ Scribed by Silvia Reich; Prof. Harald Suhr; Klára Hankó; Prof. László Szepes

Publisher
John Wiley and Sons
Year
1992
Tongue
English
Weight
437 KB
Volume
4
Category
Article
ISSN
0935-9648

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of Hydrogen on GaN Growth by Remo
Effect of Hydrogen on GaN Growth by Remote Plasma-Enhanced Metal-Organic Chemical Vapor Deposition
✍ Kim, Min Hong ;Kim, Hyun Jin ;Na, Hyun Seok ;Qi, Feng ;Yoon, Euijoon 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 231 KB 👁 1 views

The effects of hydrogen on GaN growth by remote plasma-enhanced metal-organic chemical vapor deposition (RPE-MOCVD) were investigated. Hydrogen addition changed the gas-phase reaction in the plasma and resulted in a Ga excess growth condition by scavenging activated nitrogen species, resulting in de

Site-Specific Patterning of Biomolecules
Site-Specific Patterning of Biomolecules and Quantum Dots on Functionalized Surfaces Generated by Plasma-Enhanced Chemical Vapor Deposition
✍ J. M. Slocik; E. R. Beckel; H. Jiang; J. O. Enlow; J. S. Zabinski Jr.; T. J. Bun 📂 Article 📅 2006 🏛 John Wiley and Sons 🌐 English ⚖ 457 KB

Micropatterned surfaces have received extensive attention for possible applications in advanced technologies including microelectronics, [1,2] microfluidics, [3,4] cell-growth confinement, [5,6] and biosensor fabrication. [7,8] The latter two applications exemplify the increasing coordination betwee