## Abstract Simultaneous improvement of mechanical properties and lowering of the dielectric constant occur when films grown from the cyclic monomer tetravinyltetramethylcyclotetrasiloxane (V4D4) via initiated chemical vapor deposition (iCVD) are thermally cured in air. Clear signatures from silses
โฆ LIBER โฆ
Initiated and Oxidative Chemical Vapor Deposition of Polymeric Thin Films: iCVD and oCVD
โ Scribed by Wyatt E. Tenhaeff; Karen K. Gleason
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 464 KB
- Volume
- 18
- Category
- Article
- ISSN
- 1616-301X
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