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Microstructure and mechanical properties of AlN films obtained by plasma enhanced chemical vapor deposition

✍ Scribed by Gustavo Sánchez; B. Abdallah; P. Tristant; C. Dublanche-Tixier; M. A. Djouadi; M. P. Besland; P. Y. Jouan; A. Bologna Alles

No coin nor oath required. For personal study only.

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