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Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

โœ Scribed by S. B. Singh; M. Pandey; N. Chand; A. Biswas; D. Bhattacharya; S. Dash; A. K. Tyagi; R. M. Dey; S. K. Kulkarni; D. S. Patil

Book ID
107582160
Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
381 KB
Volume
31
Category
Article
ISSN
0250-4707

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๐Ÿ“œ SIMILAR VOLUMES

Structural and mechanical characterizati
Structural and mechanical characterization of diamond like carbon films grown by microwave plasma CVD
โœ Sambita Sahoo; Swati S. Pradhan; Venkateswarlu Bhavanasi; S.K. Pradhan ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 899 KB

Diamond like carbon (DLC) films is useful for tribology, optical and biocompatible coating applications. Plasma-activated processes such as radio frequency (RF) plasma CVD and electron cyclotron resonance (ECR) microwave (MW) plasma CVD are usually used to grow DLC films. By using a bowl shaped stee