Diamond like carbon coatings deposited by microwave plasma CVD: XPS and ellipsometric studies
β Scribed by R. M. Dey; M. Pandey; D. Bhattacharyya; D. S. Patil; S. K. Kulkarni
- Book ID
- 107582055
- Publisher
- Springer-Verlag
- Year
- 2007
- Tongue
- English
- Weight
- 221 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0250-4707
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Diamond like carbon (DLC) films is useful for tribology, optical and biocompatible coating applications. Plasma-activated processes such as radio frequency (RF) plasma CVD and electron cyclotron resonance (ECR) microwave (MW) plasma CVD are usually used to grow DLC films. By using a bowl shaped stee
## Abstract Nanocrystalline diamond (NCD) films were grown by microwave plasma CVD in hydrogenβbased gas mixture. Deposition experiments were performed at different temperatures varying from 370 to 1100 Β°C. Before growth step, silicon (100) oriented substrates were nucleated by bias enhanced nuclea