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Mechanical and electrical properties of diamond-like carbon films deposited by plasma source ion implantation

✍ Scribed by K. Baba; R. Hatada; S. Flege; W. Ensinger

Book ID: 108224472
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 433 KB
Volume: 267
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2009.01.105

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