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Optical and mechanical properties of nanocrystalline aluminum oxynitride films prepared by electron cyclotron resonance plasma enhanced chemical vapor deposition

✍ Scribed by Wende Xiao; X Jiang

Book ID
108165722
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
376 KB
Volume
264
Category
Article
ISSN
0022-0248

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