A comparative study of Ar and H2 as carrier gases for the growth of SiC films on Si(100) by electron cyclotron resonance chemical vapor deposition at low temperature

✍ Scribed by Lee, Wen-Horng; Lin, Jing-Cheng; Lee, Chiapyng; Cheng, Huang-Chung; Yew, Tri-Rung

• Book ID: 123593683
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 591 KB
• Volume: 10
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(01)00482-4