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Improvement of nanocrystalline diamond film growth process using pulsed Ar/H 2 /CH 4 microwave discharges

✍ Scribed by Bruno, P; Bénédic, F; Mohasseb, F; Lombardi, G; Silva, F; Hassouni, K

Book ID: 121249387
Publisher: Institute of Physics
Year: 2004
Tongue: English
Weight: 298 KB
Volume: 37
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/37/22/L01

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