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Study of nanocrystalline diamond film growth in rf hybrid laser deposition systems in O2, H2and H2+Ar ambients

✍ Scribed by M. Novotný; M. Jelínek; J. Bulíř; J. Lančok; V. Vorlíček; J. Bonarski


Book ID
106019393
Publisher
Springer
Year
2004
Tongue
English
Weight
348 KB
Volume
79
Category
Article
ISSN
1432-0630

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Versatile properties of nanocrystalline
✍ Monéger, D. ;Bénédic, F. ;Sarry, F. ;Renard, P. ;Azouani, R. ;Elmazria, O. ;Silv 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 255 KB

## Abstract In this paper, we discuss on the versatility of nanocrystalline diamond (NCD) film properties as a function of the process parameters aiming to properly fulfil the requirements for various applications. NCD films are achieved in Ar/H~2~/CH~4~ microwave discharges. Their characteristics