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Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H 2 /C 2 H 2 and Ar/H 2 /CH 4 plasmas used for the synthesis of nanocarbon structures

✍ Scribed by Gordillo-Vázquez, F J; Camero, M; Gómez-Aleixandre, C

Book ID: 120017059
Publisher: Institute of Physics
Year: 2005
Tongue: English
Weight: 479 KB
Volume: 15
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/15/1/007

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