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Film deposition on the inner surface of tubes using atmospheric-pressure Ar–CH 4 , Ar–C 2 H 2 and Ar–C 2 H 2 –H 2 plasmas: interpretation of film properties from plasma-chemical kinetics

✍ Scribed by Pothiraja, Ramasamy; Engelhardt, Max; Bibinov, Nikita; Awakowicz, Peter

Book ID
120989978
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
844 KB
Volume
45
Category
Article
ISSN
0022-3727

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✍ M. Camero; F. J. Gordillo-Vázquez; C. Gómez-Aleixandre 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 688 KB

## Abstract A study of the synthesis of carbon nanoparticles embedded in carbon thin films deposited by radiofrequency (RF) (13.56 MHz) Ar/H~2~ (4 %)/C~2~H~2~ plasmas is presented. The carbon nanospheres exhibit an amorphous structure that is clearly observed at 300 W, under 0.1 Torr, and grows in