Growth precursors and dynamics of dust particle formation in the Ar/CH4 and Ar/C2H2 plasmas
โ Scribed by Hong, S; Berndt, J; Winter, J
- Book ID
- 111978118
- Publisher
- Institute of Physics
- Year
- 2002
- Tongue
- English
- Weight
- 832 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0963-0252
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## Abstract Molecule and particle formation in a capacitively coupled radioโfrequency discharge has been investigated. Formation of molecular ions has been investigated by means of plasma process monitoring employing energydispersive mass spectrometry. Particle growth has been studied by recording
Reflected shock waves were used to heat N20/C2H6/CO/Ar and N20/CH4/CO/Ar mixtures to temperatures of 1875-2855 K at total concentrations of 5 ร 1018 cm -a. Oxygen atom production was monitored via the flame band emission at 450 nm, and CO 2 production was observed at 4.27 tzm. These data were then c