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Dust formation in Ar/CH4 and Ar/C2H2 plasmas

✍ Scribed by Winter, J; Berndt, J; Hong, S-H; Kovačević, E; Stefanović, I; Stepanović, O

Book ID: 111978119
Publisher: Institute of Physics
Year: 2009
Tongue: English
Weight: 425 KB
Volume: 18
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/18/3/034010

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