𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Distinct nonequilibrium plasma chemistry of C2 affecting the synthesis of nanodiamond thin films from C2H2 (1%)/H2/Ar-rich plasmas

✍ Scribed by Gordillo-Vazquez, F. J.; Albella, J. M.

Book ID
118278363
Publisher
American Institute of Physics
Year
2003
Tongue
English
Weight
345 KB
Volume
94
Category
Article
ISSN
0021-8979

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Low-Pressure PECVD of Nanoparticles in C
Low-Pressure PECVD of Nanoparticles in Carbon Thin Films from Ar/H2/C2H2 Plasmas: Synthesis of Films and Analysis of the Electron Energy Distribution Function
✍ M. Camero; F. J. Gordillo-VΓ‘zquez; C. GΓ³mez-Aleixandre πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 688 KB

## Abstract A study of the synthesis of carbon nanoparticles embedded in carbon thin films deposited by radiofrequency (RF) (13.56 MHz) Ar/H~2~ (4 %)/C~2~H~2~ plasmas is presented. The carbon nanospheres exhibit an amorphous structure that is clearly observed at 300 W, under 0.1 Torr, and grows in

XPS and IR analysis of thin barrier film
XPS and IR analysis of thin barrier films polymerized from C2H4/CHF3 ECR-plasmas
✍ M. Walker; K.-M. BaumgΓ€rtner; M. Ruckh; M. Kaiser; H. W. Schock; E. RΓ€uchle πŸ“‚ Article πŸ“… 1997 πŸ› John Wiley and Sons 🌐 English βš– 182 KB πŸ‘ 2 views

Thin fluorocarbon polymer films are prepared on PE-foils in low-pressure electron cyclotron resonance plasmas using ethylene (C 2 H 4 ) and trifluoromethane (CHF 3 ) as monomers. The thin fluorinated hydrocarbon layers strongly reduces the permeability of polyethylene to alkanes. For example, the pe