XPS and IR analysis of thin barrier films polymerized from C2H4/CHF3 ECR-plasmas

✍ Scribed by M. Walker; K.-M. Baumgärtner; M. Ruckh; M. Kaiser; H. W. Schock; E. Räuchle

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 182 KB
• Volume: 64
• Category: Article
• ISSN: 0021-8995
• DOI: 10.1002/(sici)1097-4628(19970425)64:4<717::aid-app11>3.0.co;2-r

✦ Synopsis

Thin fluorocarbon polymer films are prepared on PE-foils in low-pressure electron cyclotron resonance plasmas using ethylene (C 2 H 4 ) and trifluoromethane (CHF 3 ) as monomers. The thin fluorinated hydrocarbon layers strongly reduces the permeability of polyethylene to alkanes. For example, the permeation of toluene was decreased by a factor of about 100 by a single, thin fluorocarbon layer. A further reduction of the permeation down to a factor of 1600 can be obtained by a multilayer coating. X-ray photoelectron spectroscopy and Fourier transform IR spectroscopy are used to characterize the plasma polymerized films. It is shown that the addition of CHF 3 to a C 2 H 4 plasma leads to an increase of CF 3 {, CF 2 {, and CF{ groups and to a decrease of CH 3 { and CH 2 { groups in the film. The chemical composition of the polymer layers and their toluene permeabilities are discussed.