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Investigation of processes in low-pressure expanding thermal plasmas used for carbon nitride deposition: I. Ar/N2/C2H2 plasma

✍ Scribed by Dinescu, G; Graaf, A de; Aldea, E; Sanden, M C M van de

Book ID: 111919564
Publisher: Institute of Physics
Year: 2001
Tongue: English
Weight: 225 KB
Volume: 10
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/10/3/316

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