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Spectroscopic study of the decomposition process of tetramethylsilane in the N2–H2 and N2–Ar low pressure plasma

✍ Scribed by Jamroz, P.; Zyrnicki, W.

Book ID
123210931
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
630 KB
Volume
14
Category
Article
ISSN
0925-9635

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