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Temperature of Particulates in Low-Pressure rf-Plasmas in Ar, Ar/H2 and Ar/N2 Mixtures

✍ Scribed by H. R. Maurer; R. Basner; H. Kersten

Publisher: John Wiley and Sons
Year: 2010
Tongue: English
Weight: 292 KB
Volume: 50
Category: Article
ISSN: 0005-8025
DOI: 10.1002/ctpp.201000022

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